Abstract: In order to improve the ability of enterprises to deal with the semiconductor clean room emergency accidents, the establishment of emergency management system and improvement of disposal technology were studied. According to the characteristics of clean room structure and fire-fighting system, the risk evolution characteristics were analyzed. Combined with the enterprise's own organizational structure and relevant laws and regulations, the ERT organization of the enterprise is established, and the grid management of enterprise fire protection is taken as a supplement. According to the analysis of typical accidents, the emergency disposal technology of low- level fire and high- level water leakage is obtained. The organic combination of management and technology effectively improves the firefighting management level of the enterprise. 

Key words: clean room, fire, water leakage, emergency management, disposal technology